| 发明名称 |
PRODUCTION OF SEMICONDUCTOR DEVICE |
| 摘要 |
<p>PURPOSE:To accurately cut wirings even if the window accuracy of the resist of the uppermost surface is inferior by providing cutting windows highly accurately in an insulation film before forming beam leads.</p> |
| 申请公布号 |
JPS5368183(A) |
申请公布日期 |
1978.06.17 |
| 申请号 |
JP19760144108 |
申请日期 |
1976.11.30 |
| 申请人 |
FUJITSU LTD |
发明人 |
TAKADA CHIYUUICHI;UCHIYAMA YORIHIRO;ABE RIYOUJI;MANO TOORU;SERIGANO MAKOTO |
| 分类号 |
G11C17/00;G11C17/08;H01L21/82 |
主分类号 |
G11C17/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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