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发明名称
ELECTRON GUN UNIT OF ELECTRON MICROSCOPE AND EQUIVALENT UNIT
摘要
申请公布号
JPS5366151(A)
申请公布日期
1978.06.13
申请号
JP19760141147
申请日期
1976.11.26
申请人
HITACHI LTD
发明人
MATSUI ISAO;NAMIKAWA YOSHIHISA
分类号
H01J37/06
主分类号
H01J37/06
代理机构
代理人
主权项
地址
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