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发明名称
MANUFACTURE OF INTEGRATED SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5365676(A)
申请公布日期
1978.06.12
申请号
JP19760141896
申请日期
1976.11.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
MIYOSHI HIROKAZU;NAGASAWA KOUICHI
分类号
H01L27/12;H01L21/84
主分类号
H01L27/12
代理机构
代理人
主权项
地址
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ihrifath betattur í complement-kerfi
