| 发明名称 |
ELECTRON BEAM SPOT SHAPE MEASURING APPARATUS |
| 摘要 |
PURPOSE:To make measurement of the shapes of the electron beam spots of arbitrary shapes by performing multidirectional scanning of the electron beam.
|
| 申请公布号 |
JPS5364547(A) |
申请公布日期 |
1978.06.09 |
| 申请号 |
JP19760139555 |
申请日期 |
1976.11.22 |
| 申请人 |
NIPPON TELEGRAPH & TELEPHONE |
发明人 |
OOKUBO TSUNEO;FUJINAMI AKIHIRA;IWATA ATSUSHI |
| 分类号 |
G01T1/29;G01B15/04 |
主分类号 |
G01T1/29 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
