| 发明名称 |
POSITION ALIGNING DEVICE |
| 摘要 |
PURPOSE:To perform position aligning at high accuracy by means of coarse adjustment feeding and screw feeding by screw feeding and fine adjustment feeding by a dynamic type electromechanical transducer, electrostrictive element driving. |
| 申请公布号 |
JPS5364478(A) |
申请公布日期 |
1978.06.08 |
| 申请号 |
JP19760139915 |
申请日期 |
1976.11.20 |
| 申请人 |
NIPPON TELEGRAPH & TELEPHONE;FUJITSU LTD |
发明人 |
NAKAYAMA SATORU;HAYASAKA TOUA;OOTSUKA NAOJI;YAMAZAKI SHINICHI;YOSHIDA KAZUE;HIYANE MASAO;FUSHIDA YOSHIROU;NAKAMURA KAZUMASA;TAMAMUSHI KAZUO;SUZUKI HIDEO |
| 分类号 |
H05K3/00;B23Q1/34;B23Q1/48;G03F9/00;G05D3/12;H01L21/027;H01L21/30 |
主分类号 |
H05K3/00 |
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