| 发明名称 |
PROCESSING APPARATUS |
| 摘要 |
PURPOSE:To maintain the environment in a treatment room in a satisfactory state by letting a liquid form substance form substance fall onto the inside side wall surface of the treatment room from the upper part of the inside side wall surface to the lower part. |
| 申请公布号 |
JPS5364472(A) |
申请公布日期 |
1978.06.08 |
| 申请号 |
JP19760139579 |
申请日期 |
1976.11.22 |
| 申请人 |
HITACHI LTD |
发明人 |
KANOU SUSUMU;KAWANABE TAKAO |
| 分类号 |
H01L21/30;C23F1/08;G03F7/16;G03F7/30;H01L21/027;H01L21/302;H05K3/06 |
主分类号 |
H01L21/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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