| 发明名称 |
POSITION ALIGNING SYSTEM |
| 摘要 |
PURPOSE:To perform highly accurate position alignment by perfrming position detection having been sufficiently removed of noise components through the use of marks of simple shapes and performing the calculation of position correction amounts and the evaluation of the optimum position alignment accuracy after the correction. |
| 申请公布号 |
JPS5364479(A) |
申请公布日期 |
1978.06.08 |
| 申请号 |
JP19760140485 |
申请日期 |
1976.11.22 |
| 申请人 |
NIPPON TELEGRAPH & TELEPHONE;FUJITSU LTD |
发明人 |
ISHIHARA SUNAO;NAKAYAMA SATORU;HAYASAKA TOUA;ODA MIYAO;TAMAMUSHI KAZUO;SUZUKI HIDEO |
| 分类号 |
H05K3/00;G03F9/00;G05D3/00;G05D3/12;H01L21/027;H01L21/30;H01L21/68;H05K3/06 |
主分类号 |
H05K3/00 |
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