METHOD OF FORMING RESIST PATTERN,申请号JP19760138401-传众专利搜索

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发明名称	METHOD OF FORMING RESIST PATTERN
摘要
申请公布号	JPS5363573(A)	申请公布日期	1978.06.07
申请号	JP19760138401	申请日期	1976.11.19
申请人	TORAY INDUSTRIES	发明人	YOSHINO TSUNEO
分类号	H05K3/06;C23F1/00;G03F1/00;G03F7/004;H05K3/00	主分类号	H05K3/06
代理机构		代理人
主权项
地址

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