发明名称 COMPLEMENTARY TYPE MOS SEMICONDUCTOR
摘要 PURPOSE:To obtain channels of submicrons for both P and N channels and increase speed by forming gates in the V-groove formed in semiconductor substrate and reduce element area by employing vertical type structure.
申请公布号 JPS5362988(A) 申请公布日期 1978.06.05
申请号 JP19760138951 申请日期 1976.11.17
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 INOUE MICHIHIRO
分类号 H01L21/8238;H01L27/04;H01L27/092;H01L29/78 主分类号 H01L21/8238
代理机构 代理人
主权项
地址