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发明名称
MASKING METHOD
摘要
申请公布号
JPS5361533(A)
申请公布日期
1978.06.02
申请号
JP19760138215
申请日期
1976.11.16
申请人
MITSUBISHI ELECTRIC CORP
发明人
TAKANO HIROZOU;NISHIOKA SUNAO
分类号
C23F1/00;C23F1/02;H01L21/302;H01L21/306
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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