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发明名称
摘要
申请公布号	FR2270616(B1)	申请公布日期	1978.06.02
申请号	FR19740016288	申请日期	1974.05.10
申请人	COMMISSARIAT A ENERGIE ATOMIQUE	发明人
分类号	H01L21/30;G02B7/00;G03F7/20;H01L21/027;(IPC1-7):G03B27/42;H01L21/00	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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