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发明名称
SEMICONDUCTOR UNIT
摘要
申请公布号
JPS5359379(A)
申请公布日期
1978.05.29
申请号
JP19760134052
申请日期
1976.11.10
申请人
HITACHI LTD
发明人
TAKEDA EIJI;NISHIMATSU SHIGERU
分类号
H01L29/78;H01L21/8234;H01L27/04;H01L27/06
主分类号
H01L29/78
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代理人
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