发明名称 Photometric centre microscopic determination - is for optically effective structure and uses parallel slit displaced relative to structure with receiver and discriminator
摘要 <p>A photo-electric microscoper system is used for determination of photometric centre of optically effective structure uses parallel slit displaced relative to structure, receiver and discriminator. The width of the parallel slit is at least as big as the width of the structure. The photo-electronic receiver is arranged behind the slit. The signal emitted by the receiver is applied to the first input of the series-connected discriminator. A mean value former is connected between the receiver and the second input of the discriminator. The reflecting mark (1) is illuminated and imaged via the objective (2) in the parallel slit (3). The receiver (4) emits an output signal.</p>
申请公布号 FR2369539(A1) 申请公布日期 1978.05.26
申请号 FR19770032494 申请日期 1977.10.27
申请人 ZEISS JENA VEB CARL 发明人
分类号 G01D5/30;G01B11/02;G01D3/06;G01D5/38;(IPC1-7):01B9/04 主分类号 G01D5/30
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