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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5358763(A)
申请公布日期
1978.05.26
申请号
JP19760133176
申请日期
1976.11.08
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
OKUMURA KATSUYA;SHIROTSUME YOSHINOBU
分类号
H01L21/52;H01L21/58
主分类号
H01L21/52
代理机构
代理人
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地址
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