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发明名称
MULTIIELECTRON GUNS FOR ELECTRON BEAM WORKING APPARATUS
摘要
申请公布号
JPS5357599(A)
申请公布日期
1978.05.24
申请号
JP19760132650
申请日期
1976.11.04
申请人
FUJITSU LTD
发明人
YASUDA HIROSHI;TSUCHIKAWA HARUO;NAKAMURA MORITAKA
分类号
H01J37/06;H01J37/30
主分类号
H01J37/06
代理机构
代理人
主权项
地址
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