发明名称 METHOD OF FORMING A RESIST IMAGE
摘要 <p>1511992 Polyfluoroalkyl methacrylates NIPPON TELEGRAPH & TELEPHONE PUBLIC CORP 18 Jan 1977 [23 Jan 1976] 01977/77 Heading C2C [Also in Divisions G2 and C3] Preparation of monomoric 2,2,3,4,4,4-hexafluorobutyl methacrylate; methacrylic chloride and 2,2,3,4,4,4-hexafluorobutanol are reacted together with heating in a nitrogen atomosphere and in the presence of hydroquinone methyl ether as a polymerization inhibitor. Similar products are prepared using other fluorine substituted alcohols.</p>
申请公布号 GB1511992(A) 申请公布日期 1978.05.24
申请号 GB19770001977 申请日期 1977.01.18
申请人 NIPPON TELEGRAPH & TELEPHONE PUBLIC CORP 发明人
分类号 G03F7/004;C08F20/00;C08F20/22;G03F7/039;H01F41/34;H01L21/027;(IPC1-7):03C1/495;08F120/22;07C69/65 主分类号 G03F7/004
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