| 摘要 |
A high-vacuum pump is disclosed as including a molecular pump assembly and an oil-seated rotary pump assembly, a speed change mechanism being interposed between the two assemblies so as to transmit driving forces, with a predetermined ratio, between the assemblies. The molecular pump assembly includes a housing having inlet and outlet ports, and spiral grooves, including main and subsidiary grooves, are provided upon interior wall surfaces of the housing so as to establish fluidic communication between the ports. A vacuum-sealed rotor, suitably mounted upon a first drive shaft, is rotatably disposed within the housing so as to achieve a compression and pumping operation of fluid along the spiral grooves from the inlet port to the outlet port, and the oil-sealed rotary pump assembly is likewise provided with inlet and outlet ports, the inlet port thereof being directly connected to the outlet port of the molecular pump assembly. A rotor, suitably mounted upon a second drive shaft, is likewise disposed within a chamber of the rotary pump in such a manner as to define therewith variable-volume chambers fluidically connected to the inlet and outlet ports thereof, and the speed-change mechanism mechanically connects the drive shafts of both pump assemblies.
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