Polymerising gas to electrical insulating layer - using high frequency alternating voltage, and adjusting impulse frequency and gas pressure

摘要

In prepn. of electrically insulating layers by polymerising gases by a high frequency alternating voltage, the alternating frequency and the gas pressure in the chamber are such that the polymerisable molecules traverse approximately their mean free path between 2 changes of pole of the applied tension. The layers are esp. suitable as dielectric layers in electrical condensers. Layers of uniformly high quality are obtd. Layers 3 u thick, which do not become displaced from the support during prodn. of condensers, can be prepd. The layers are resistant to solvents and corrosion, and to brief heating to 300 degrees C. Other uses include appln. in integrated switches, and passivation of semiconductor surfaces.