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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5353966(A)
申请公布日期
1978.05.16
申请号
JP19760129212
申请日期
1976.10.26
申请人
NIPPON ELECTRIC CO
发明人
FUJISADA SHIYOUICHI
分类号
H01L21/3213;H01L21/28
主分类号
H01L21/3213
代理机构
代理人
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