| 摘要 |
<p>PURPOSE:To make it possible to obtain a humidity sensor prevented from the elution of an electrolyte even under high humidity, good in water adsorbability and high in a response speed, by using phosphate ester of a monomer having a polymerizable functional group in the molecule thereof as an electrolyte. CONSTITUTION:For example, a pair of comb-shaped detection electrodes 2 comprising Au is provided on an insulating substrate 1 made of alumina and a cured humidity sensitive layer 3 comprising org. high-molecular substance containing phosphate ester of a monomer having an unsaturated ethylenic double bond and a hydroxyl group in the molecule thereof as an electrolyte is formed on the entire surface of said substrate 1. Because the electrolyte is strongly bonded to the high-molecular substance, a humidity sensor which is prevented from the elution of the electrolyte even by dew condensation under high humidity and, therefore, excellent in humidity sensitivity, good in water absorbability, high in a response speed, low in resistance (40%, 1MOMEGA or less) and facilitated in forming a detection circuit can be fabricated within a short time by ultraviolet curing.</p> |
