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发明名称
PRODUCTION OF GATE ELECTRODE OF MOS TYPE FIELD EFFECT TRANSISTOR
摘要
申请公布号
JPS5352080(A)
申请公布日期
1978.05.12
申请号
JP19760126868
申请日期
1976.10.22
申请人
NIPPON ELECTRIC CO
发明人
SAKAI KIYOSHI
分类号
H01L29/78;H01L21/28;H01L21/288
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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