发明名称 DRIVING METHOD OF ELECTROSTRICTION TYPE CONVERTER
摘要 PURPOSE:To make it possible to detect positioning and set a position stably by cutting off the AC driving voltage while descending it gradually at the time when the positioning of moving and fixing marks is completed by the AC-DC superposed voltage.
申请公布号 JPS5352098(A) 申请公布日期 1978.05.12
申请号 JP19760127478 申请日期 1976.10.22
申请人 NIPPON TELEGRAPH & TELEPHONE;FUJITSU LTD 发明人 OOTSUKA NAOJI;YOSHIDA KAZUE;TAMAMUSHI KAZUO;OOTSUKA SATORU
分类号 G11B5/592;H01L41/00;H01L41/09;H02N2/00 主分类号 G11B5/592
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