发明名称 MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To manufacture duplicated insulating layers on the substrate and to manufacture the impurity added layer without injuring the flatness of the substrate surface from the second layer opening part.
申请公布号 JPS5351981(A) 申请公布日期 1978.05.11
申请号 JP19760126959 申请日期 1976.10.21
申请人 FUJITSU LTD 发明人 SEI HIDEO;ARAKAWA ISAO;MIYAMOTO YOSHIHIRO
分类号 H01L29/762;H01L21/339;H01L27/10;H01L29/76;H01L29/768;H01L29/772 主分类号 H01L29/762
代理机构 代理人
主权项
地址