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发明名称
摘要
申请公布号	JPS5353967(U)	申请公布日期	1978.05.09
申请号	JP19760134795U	申请日期	1976.10.08
申请人		发明人
分类号	H01L21/283;H01L21/24;H01L29/40;(IPC1-7):H01L29/40	主分类号	H01L21/283
代理机构		代理人
主权项
地址

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