发明名称 ULTRASONIC WIRE BONDER
摘要 PURPOSE:To eliminate a faulty junction due to a harmful vibration as well as to reduce the dispersion of the pressure bonding width and the tensile strength for the ultrasonic junction, by providing a vibration absorbing damper such as an oil damper, etc. to X and Y boards or the sample rotary column.
申请公布号 JPS5349947(A) 申请公布日期 1978.05.06
申请号 JP19760123802 申请日期 1976.10.18
申请人 发明人
分类号 B23K20/00;B23K20/10;H01L21/60;H01L21/607;H01L21/68 主分类号 B23K20/00
代理机构 代理人
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