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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5348470(A)
申请公布日期
1978.05.01
申请号
JP19760123655
申请日期
1976.10.14
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NOYORI MASAHARU;FUJIMOTO HIROAKI
分类号
H01L21/68;H01L21/58
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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