| 发明名称 |
CONTROL SYSTEM OF CHARGED PARTICLE BEAM DEFLECTION |
| 摘要 |
PURPOSE:To improve speed and accuracy by making selective use of an analog system which generates a triangular deflection signal being of low speed but having good linearity and a digital system which generates a stepwise deflection signal changing at a high speed. |
| 申请公布号 |
JPS5347776(A) |
申请公布日期 |
1978.04.28 |
| 申请号 |
JP19760123166 |
申请日期 |
1976.10.14 |
| 申请人 |
NIPPON TELEGRAPH & TELEPHONE;HITACHI LTD |
发明人 |
IWATA ATSUSHI;FUJINAMI AKIHIRA;SHIBAYAMA AKINORI;YOKOZAWA NORIO;MAIO KENJI;FUJIKATA KENJI |
| 分类号 |
H01J37/147;G09G1/08;H01L21/027;H04N3/16 |
主分类号 |
H01J37/147 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
