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发明名称
Verfahren und Vorrichtung zum Polieren von Duennschichtelementen
摘要
申请公布号
DE2152318(A1)
申请公布日期
1972.04.27
申请号
DE19712152318
申请日期
1971.10.20
申请人
MONSANTO CO.
发明人
JEROME WALSH,ROBERT
分类号
B24B37/04;H01L21/302
主分类号
B24B37/04
代理机构
代理人
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