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发明名称
PREPARATION OF CRYSTAL
摘要
申请公布号
JPS5345680(A)
申请公布日期
1978.04.24
申请号
JP19760120431
申请日期
1976.10.08
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
YASUAMI SHIGERU
分类号
C30B15/00;C30B15/22;H01L21/208
主分类号
C30B15/00
代理机构
代理人
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地址
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