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经营范围
发明名称
VACUUM DEVICE FOR DEPOSITING FILMS
摘要
申请公布号
SU605860(A1)
申请公布日期
1978.04.24
申请号
SU19762392229
申请日期
1976.08.01
申请人
DN OTDEL I MEKHANIKI AN UK SSR
发明人
KOSTYLEV SERGEJ A,SU;SHKUT VALERIJ A,SU
分类号
C23C14/26;C23C14/24;(IPC1-7):23C13/08
主分类号
C23C14/26
代理机构
代理人
主权项
地址
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