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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5345177(A)
申请公布日期
1978.04.22
申请号
JP19760120104
申请日期
1976.10.06
申请人
FUJITSU LTD
发明人
HASEGAWA HITOSHI;WADA KUNIHIKO
分类号
H01L21/322;H01L21/31;H01L21/324
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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