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发明名称
Verfahren zum Herstellen von rohrfoermigen Koerpern aus Halbleitermaterial
摘要
申请公布号
DE2060651(A1)
申请公布日期
1972.06.29
申请号
DE19702060651
申请日期
1970.12.09
申请人
SIEMENS AG
发明人
DIETZE,WOLFGANG,DR.;REUSCHEL,KONRAD,DR.;KASPER,ANDREAS
分类号
C23C16/01;C23C16/22;C30B23/00
主分类号
C23C16/01
代理机构
代理人
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