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发明名称
摘要
申请公布号
DE2310724(B2)
申请公布日期
1978.04.20
申请号
DE19732310724
申请日期
1973.03.03
申请人
MITSUBISHI DENKI K.K., TOKIO
发明人
TAKAMIYA, SABURO, ITAMI, HYOGO (JAPAN)
分类号
H01L31/10;H01L21/331;H01L29/73;H01L31/00;H01L31/11;(IPC1-7):H01L31/10
主分类号
H01L31/10
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