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发明名称
摘要
申请公布号
JPS5311351(B2)
申请公布日期
1978.04.20
申请号
JP19730080127
申请日期
1973.07.16
申请人
发明人
分类号
H01L21/316
主分类号
H01L21/316
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代理人
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