发明名称 |
PNEUMATIC CONTROL VALVE FOR VACUUM CHAMBERS |
摘要 |
The invention concerns a differential pressure responsive valve of simple construction contained within the vacuum zone of high vacuum apparatus and operable to protect an ion pump by opening only after the pressure in a work chamber has been reduced to low level by a roughing pump.
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申请公布号 |
US3687570(A) |
申请公布日期 |
1972.08.29 |
申请号 |
USD3687570 |
申请日期 |
1969.08.11 |
申请人 |
VACUUM/ATMOSPHERES CORP. |
发明人 |
JOHN M. ELLISON |
分类号 |
F04B37/08;F16K51/02;(IPC1-7):F04B41/06;F16K31/14 |
主分类号 |
F04B37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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