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发明名称
MAGNETRON MAGNETIC CIRCUIT FOR SPUTTERING DEVICE
摘要
申请公布号
JPS5342669(A)
申请公布日期
1978.04.18
申请号
JP19760118006
申请日期
1976.09.30
申请人
SANYOU SHINKUU KOUGIYOU KK;SUMITOMO SPEC METALS
发明人
KITAHATA AKIHIRO;DATE TETSUYA;MIYAMOTO TAKANOBU;KUKITA TERUYOSHI
分类号
H05B6/74;C23C14/34;C23C14/35;C23C14/36;H01J23/10
主分类号
H05B6/74
代理机构
代理人
主权项
地址
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