发明名称 Method for manufacturing electrical solid state devices utilizing shadow masking and ion-implantation
摘要 The present invention describes the manufacture of a chip having a stratum in which a number of diffusions are spaced from each other by boundaries whose widths is the width of a gap. The diffusion on one side of a boundary is formed by ion bombardment, and that on the other side by heat transfer of ions of a material with which the film has been doped.
申请公布号 US4084987(A) 申请公布日期 1978.04.18
申请号 US19760726796 申请日期 1976.09.27
申请人 PLESSEY HANDEL UND INVESTMENTS A.G. 发明人 GODBER, GEOFFREY ALLAN
分类号 H01L21/033;H01L21/225;H01L21/266;(IPC1-7):H01L21/26;H01L21/31 主分类号 H01L21/033
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