| 发明名称 |
BACKING PLATE FOR SLICING OF SEMICONDUCTOR INGOTS |
| 摘要 |
PURPOSE:To prevent oscillation of a diamond wheel during revolution by contituting a backing plate through the use of a material of hardness equivalent to or lower than that of a semiconductor ingot.
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| 申请公布号 |
JPS5339856(A) |
申请公布日期 |
1978.04.12 |
| 申请号 |
JP19760115068 |
申请日期 |
1976.09.24 |
| 申请人 |
NIPPON ELECTRIC CO |
发明人 |
YAMAGISHI SOUKICHI |
| 分类号 |
B28D5/02;B26D7/02;B26D7/08;B28D5/00;H01L21/00;H01L21/304 |
主分类号 |
B28D5/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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