发明名称 DETECTION METHOD OF POSITION DEVIATION OF BONDING
摘要 PURPOSE:A conductivity detection part which detects the position deviation of bonding is provided to the circumference of a bonding pad, and when the position deviation occurs, it is made in contact with the detection part to generate and electric signal, so that the position deviation can be detected accurately while hands being eliminated.
申请公布号 JPS5340276(A) 申请公布日期 1978.04.12
申请号 JP19760115636 申请日期 1976.09.27
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 SASAKI SHIGEO
分类号 B23K1/00;B23K37/04;H01L21/60;H01L21/66 主分类号 B23K1/00
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