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发明名称
PHOTO RESIST FRILLING AGENT
摘要
申请公布号
JPS5339127(A)
申请公布日期
1978.04.10
申请号
JP19760113366
申请日期
1976.09.21
申请人
FUJI YAKUHIN KOGYO KK
发明人
ASANO TAKATERU
分类号
H01L21/30;G03C11/00;G03F7/30;G03F7/42;H01L21/02;H01L21/027
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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