| 发明名称 |
PELLET POSITION DETECTING APPARATUS |
| 摘要 |
PURPOSE:To enhance the accuracy of position inspection by deciding the third side from information on two sides, matching the patterns to standard patterns and removing the patterns being erroneously recongnized, and correcting the center in alignment to the straight line which has been checked in alignment of the second side. |
| 申请公布号 |
JPS5339157(A) |
申请公布日期 |
1978.04.10 |
| 申请号 |
JP19760113487 |
申请日期 |
1976.09.21 |
| 申请人 |
NIPPON ELECTRIC CO |
发明人 |
NARUSE MASAYUKI;SHIMADA MASANAO;IGARASHI KENICHI;SAKAGAWA YASUO;ARIFUKU YOSHINORI |
| 分类号 |
G01B11/00;G05D3/12;H01L21/60;H04M3/54 |
主分类号 |
G01B11/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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