| 摘要 |
The transducer comprises a substrate made of stainless steel having an opening for receiving pressure transmitting fluid, a stress absorbing member having a connecting section with a fluid passage communicated with the opening and secured to the substrate, a neck section having a smaller diameter than the connecting section and integrally connected to the connecting section and a head section having a larger diameter than the neck section and integrally connected to the neck section, a semiconductor pressure sensitive element mounted on the head section with its pressure receiving surface disposed to close the fluid passage, said stress absorbing member having substantially the same linear expansion coefficient as the semiconductor pressure sensitive element, and terminals for deriving from the semiconductor pressure sensitive element an electrical signal corresponding to the pressure of said pressure transmitting fluid. |
