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发明名称
APPARATUS FOR DETECTING POLISHING CONDITION OF PIEZOELECTRIC ELEMENT
摘要
申请公布号
JPS5336264(A)
申请公布日期
1978.04.04
申请号
JP19760110993
申请日期
1976.09.16
申请人
发明人
分类号
B23Q17/09;B24B37/013;B24B49/00;G01B7/00;G01B7/02;G01B17/02;H03H3/04
主分类号
B23Q17/09
代理机构
代理人
主权项
地址
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