| 发明名称 |
ANALYZER FOR CHARGED PARTICLES |
| 摘要 |
PURPOSE:To increase the analytical sensibility and the operating efficiency by making the secondary ions radiated from the sample the parallel beams using the composite lens in which the deflecting electrode and electrostatic lens in coaxial states are combined. |
| 申请公布号 |
JPS5336292(A) |
申请公布日期 |
1978.04.04 |
| 申请号 |
JP19760109962 |
申请日期 |
1976.09.16 |
| 申请人 |
HITACHI LTD |
发明人 |
ISHIKAWA KIYOSHI;GOTOU SUMITAKA;HAYAKAWA KAZUNOBU;ITOU MICHIYASU;USAMI KATSUHISA |
| 分类号 |
G01N23/225;H01J37/252 |
主分类号 |
G01N23/225 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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