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发明名称
FABRICATION OF RECTANGULAR RELIEF PROFILES IN PHOTORESIST
摘要
申请公布号
US4082453(A)
申请公布日期
1978.04.04
申请号
US19760694374
申请日期
1976.06.09
申请人
RCA CORPORATION
发明人
KNOP, KARL
分类号
G03B15/00;G02B5/18;G02B5/20;G02B27/42;G03B33/00;G03F7/00;(IPC1-7):G02B27/38;G03C5/04;G03B27/04;G03B27/02
主分类号
G03B15/00
代理机构
代理人
主权项
地址
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