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经营范围
发明名称
PRODUCTIN OF SEMICONDUCTOR UNIT
摘要
申请公布号
JPS5335473(A)
申请公布日期
1978.04.01
申请号
JP19760110070
申请日期
1976.09.14
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
OGATA AKINORI
分类号
H01L21/52;H01L21/58
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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