| 发明名称 |
ALIGNING METHOD |
| 摘要 |
PURPOSE:To reduce position deviation amount detecting errors and achieve the improvement in control detection density by suppressing the reference point variation by the effect of drift only to the effect of a multiplier in vibration method alignment control. |
| 申请公布号 |
JPS5335384(A) |
申请公布日期 |
1978.04.01 |
| 申请号 |
JP19760108875 |
申请日期 |
1976.09.13 |
| 申请人 |
NIPPON TELEGRAPH & TELEPHONE |
发明人 |
MINOWA KAZUO;WATANABE HIDEO |
| 分类号 |
H01L21/30;H01L21/027;H01L21/302 |
主分类号 |
H01L21/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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