发明名称 |
CHUCK FOR HOLDING FLAT WORKPIECE |
摘要 |
Disclosed is a chuck or handler for carrying thin, substantially planar workpieces intermediate process stations but while maintaining a clean air environment. The chuck includes a substantially planar surface having a workpiece receiving area thereon and a plurality of channels adjacent one edge of the planar surface but superimposed thereof. A conduit is in fluid communication with the channels and includes a foraminous diffuser element in the conduit to equalize the pressure of fluid entering the channels. A source of at least Class 100 air is connected to the conduit for supplying the channels with the gaseous media so that gaseous media emanating from the channels is essentially laminar and flows across the work area to create a surface attachment effect of the air or gaseous media over the workpiece on the work area. |
申请公布号 |
JPS5333067(A) |
申请公布日期 |
1978.03.28 |
申请号 |
JP19770088909 |
申请日期 |
1977.07.26 |
申请人 |
IBM |
发明人 |
HENRII BENJIYAMIN PORUZUII;ANSONII EMU ROBERUTEI;UIRUFURIIDO ROBAATO ROMITSUCHI |
分类号 |
B23Q3/08;B25B11/00;B28D5/00;B65G49/07;B65H3/14;H01L21/677 |
主分类号 |
B23Q3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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