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发明名称
P TYPE IMPURITY DIFFUSING METHOD TO SEMICONDUCTORS
摘要
申请公布号
JPS5333054(A)
申请公布日期
1978.03.28
申请号
JP19760106747
申请日期
1976.09.08
申请人
HITACHI LTD
发明人
TANIGUCHI HIROYUKI;KADOMA NAOHIRO
分类号
H01L21/223
主分类号
H01L21/223
代理机构
代理人
主权项
地址
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