| 发明名称 |
POSITIONING METHOD OF TWO PLATE FORM BODIES |
| 摘要 |
PURPOSE:To perform positioning of two plate form bodies by supporting the two palte form bodies respectively provided with fine-gap-form and spot-form marks to a stationary base and a moving base and calculating the required correction amount from the maximum value of photo detection outputs with adjustment of the moving base. |
| 申请公布号 |
JPS5331972(A) |
申请公布日期 |
1978.03.25 |
| 申请号 |
JP19760106002 |
申请日期 |
1976.09.05 |
| 申请人 |
NIPPON TELEGRAPH & TELEPHONE |
发明人 |
ISHIHARA SUNAO;TAKEUCHI NOBUYUKI;YOSHIDA AZUMORI |
| 分类号 |
H01L21/30;H01L21/027;H01L21/68 |
主分类号 |
H01L21/30 |
| 代理机构 |
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代理人 |
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